Ceramic chuck table is a bearing platform for fixing workpieces by the vacuum adsorption principle. These products which have high cost performance produced by the company can match with the machines made in Japan,Germany, Israel, the United States, Korea and China.

Main features

Good flatness and parallelism, compact and uniform structure with high strength, good permeability, uniform adsorption affinity and easily dressing.

Workpiece processed: 2,3,4,5,6,8,12 inches semiconductor wafers.

Suitable devices: grinding machine, dicing machine and cleaning machine ,etc.

Chuck type: Fine-pore ceramic.